Up a level |
Capan, I.; Pastuović, Ž.; Siegele, R.; Jaćimović, R. (2016) Vacancy-related defects in n -type Si implanted with a rarefied microbeam of accelerated heavy ions in the MeV range. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 372 . pp. 156-160. ISSN 0168-583X