Knežević, T.; Hadžipašić, A.; Ohshima, T.; Makino, T.; Capan, I. (2022) M-center in low-energy electron irradiated 4H-SiC. Applied Physics Letters, 120 (25). ISSN 0003-6951
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Abstract
We report on the low-energy electron irradiated 4H-SiC material studied by means of deep-level transient spectroscopy (DLTS) and Laplace-DLTS. Electron irradiation has introduced the following deep level defects: EH1 and EH3 previously assigned to carbon interstitial-related defects. We propose that EH1 and EH3 are identical to M1 and M3, also recently assigned to carbon interstitial defects, and assign them to C=(h) and C(0)h, respectively.
Item Type: | Article | ||||||||
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Uncontrolled Keywords: | silicon carbide; defects; DLTS | ||||||||
Subjects: | NATURAL SCIENCES > Physics > Condensed Matter Physics | ||||||||
Divisions: | Division of Materials Physics | ||||||||
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Depositing User: | Ivana Capan | ||||||||
Date Deposited: | 05 Feb 2024 13:54 | ||||||||
URI: | http://fulir.irb.hr/id/eprint/8460 | ||||||||
DOI: | 10.1063/5.0095827 |
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