Nanopatterning surfaces by grazing incidence swift heavy ion irradiation

Karlušić, Marko; Mičetić, Maja; Kresić, M.; Jakšić, Milko; Šantić, Branko; Bogdanović Radović, Ivančica; Bernstorff, S.; Lebius, H.; Ban-d'Etat, B.; Žužek Rožman, K.; O'Connell, J.H.; Hagemann, U.; Schleberger, M. (2021) Nanopatterning surfaces by grazing incidence swift heavy ion irradiation. Applied surface science, 541 . ISSN 0169-4332

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Abstract

Nanopatterned surfaces play a key role for many applications exploiting unique features such as an enhanced surface area, long- and short-ranged morphology modulations or a spatial variation of electronic and chemical properties. Ion beam irradiation has been frequently used for nanostructuring bulk materials because it is efficient, fast, and cost-effective. In this paper we show that ion irradiation under extremely grazing incidence in conjunction with other scalable processing methods such as wet etching and thermal annealing, is a perfect tool for nanopatterning of dielectric surfaces. We demonstrate that by tuning ion energy and fluence, one can select different surface nanopattern morphologies like individual chains of nanohillocks, nanostripes, or nanoscaled ripples. Furthermore, chemical etching of the irradiated surface can be used to create a negative replica of the nanopattern as only the material making up the surface track is susceptible to the etching process and is thus removed. Also, a removal of the surface track can be achieved by thermal annealing in vacuum. All these presented strategies open up new ways for achieving control over nanoscale surface modifications using swift heavy ion beams.

Item Type:

Article

Uncontrolled Keywords:

swift heavy ion ; ion track ; surface engineering ; nanopatterning

Subjects:

NATURAL SCIENCES > Physics

Divisions:

Division of Experimental Physics
Division of Materials Physics

Projects:

Project title	Project leader	Project code	Project type
Dinamika defekta u nanomaterijalima: istraživanje putem eksperimenata s ionskim tragovima	Karlušić, Marko	IP-2018-01-2786	HRZZ
3D mreže kompleksnih Ge-baziranih nanostruktura u staklima: svojstva i primjene	Mičetić, Maja	IP-2018-01-3633	HRZZ
Potpora vrhunskim istraživanjima Centra izvrsnosti za napredne materijale i senzore	Ivanda, Mile; Jakšić, Milko; Stipčević, Mario; Kralj, Marko	KK.01.1.1.01.0001	EK
Lowering threshold for Ion-Track Formation: Implications for Nucler Waste Immobilization	Karlušić, Marko	23009	IAEA