Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams

Božičević Mihalić, Iva; Fazinić, Stjepko; Tadić, Tonči; Jakšić, Milko; Čosić, Domagoj (2016) Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams. Journal of Analytical Atomic Spectrometry, 31 (11). pp. 2293-2304. ISSN 0267-9477

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Abstract

The progress of construction on the new IBIL (ion beam induced luminescence) spectrometer installed at the ion microprobe facility of the Ruder Boskovic Institute (RBI) is reported. The IBIL system can be used with beams from either 6.0 MV Tandem Van de Graaff or 1.0 MV Tandetron accelerators. Components of the new apparatus and current experimental set-up are described in detail. Measurements with the new IBIL system were performed using a 2 MeV proton microbeam on three sets of samples. This paper gives a summary of the IBIL arrangement capabilities for various problems, emphasising the potential of this technique for radiation damage studies. Due to the relatively good sensitivity of the IBIL spectrometer, integration into the conventional ion beam analysis (IBA) microbeam setup is shown to be possible. (C) 2014 Elsevier B.V. All rights reserved.

Item Type:	Article
Uncontrolled Keywords:	microbeam facility; nuclear microprobe; ionoluminescence; irradiation; diamond
Subjects:	NATURAL SCIENCES > Chemistry
Divisions:	Division of Experimental Physics
Projects:	Project title Project leader Project code Project type Promjene u kristaliničnim materijalima izazvane ionskim snopovima MeV-skih energija-MIOBICC Stjepko Fazinić IP-2013-11-8127 HRZZ
Depositing User:	Iva Božičević Mihalić
Date Deposited:	18 May 2017 08:57
URI:	http://fulir.irb.hr/id/eprint/3486
DOI:	10.1039/c6ja00276e

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