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Nanopatterning surfaces by grazing incidence swift heavy ion irradiation

Karlušić, Marko; Mičetić, Maja; Kresić, M.; Jakšić, Milko; Šantić, Branko; Bogdanović Radović, Ivančica; Bernstorff, S.; Lebius, H.; Ban-d'Etat, B.; Žužek Rožman, K.; O'Connell, J.H.; Hagemann, U.; Schleberger, M. (2021) Nanopatterning surfaces by grazing incidence swift heavy ion irradiation. Applied surface science, 541 . ISSN 0169-4332

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Nanopatterned surfaces play a key role for many applications exploiting unique features such as an enhanced surface area, long- and short-ranged morphology modulations or a spatial variation of electronic and chemical properties. Ion beam irradiation has been frequently used for nanostructuring bulk materials because it is efficient, fast, and cost-effective. In this paper we show that ion irradiation under extremely grazing incidence in conjunction with other scalable processing methods such as wet etching and thermal annealing, is a perfect tool for nanopatterning of dielectric surfaces. We demonstrate that by tuning ion energy and fluence, one can select different surface nanopattern morphologies like individual chains of nanohillocks, nanostripes, or nanoscaled ripples. Furthermore, chemical etching of the irradiated surface can be used to create a negative replica of the nanopattern as only the material making up the surface track is susceptible to the etching process and is thus removed. Also, a removal of the surface track can be achieved by thermal annealing in vacuum. All these presented strategies open up new ways for achieving control over nanoscale surface modifications using swift heavy ion beams.

Item Type: Article
Uncontrolled Keywords: swift heavy ion ; ion track ; surface engineering ; nanopatterning
Subjects: NATURAL SCIENCES > Physics
Divisions: Division of Experimental Physics
Division of Materials Physics
Project titleProject leaderProject codeProject type
Dinamika defekta u nanomaterijalima: istraživanje putem eksperimenata s ionskim tragovimaKarlušić, MarkoIP-2018-01-2786HRZZ
3D mreže kompleksnih Ge-baziranih nanostruktura u staklima: svojstva i primjeneMičetić, MajaIP-2018-01-3633HRZZ
Potpora vrhunskim istraživanjima Centra izvrsnosti za napredne materijale i senzoreIvanda, Mile; Jakšić, Milko; Stipčević, Mario; Kralj, MarkoKK.
Lowering threshold for Ion-Track Formation: Implications for Nucler Waste ImmobilizationKarlušić, Marko23009IAEA
Depositing User: Marko Karlušić
Date Deposited: 12 Nov 2021 13:38
DOI: 10.1016/j.apsusc.2020.148467

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