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Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization

Erich, Marko; Kokkoris, M.; Fazinić, Stjepko; Petrović, Srđan (2018) Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 416 . pp. 89-93. ISSN 0168-583X

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This work reports on the induced diamond crystal amorphization by 4 MeV carbon ions implanted in the 〈1 0 0〉 oriented crystal and its determination by application of RBS/C and EBS/C techniques. The spectra from the implanted samples were recorded for 1.2, 1.5, 1.75 and 1.9 MeV protons. For the two latter ones the strong resonance of the nuclear elastic scattering 12C(p, p0)12C at 1.737 MeV was explored. The backscattering channeling spectra were successfully fitted and the ion beam induced crystal amorphization depth profile was determined using a phenomenological approach, which is based on the properly defined Gompertz type dechanneling functions for protons in the 〈1 0 0〉 diamond crystal channels and the introduction of the concept of ion beam amorphization, which is implemented through our newly developed computer code CSIM.

Item Type: Article
Additional Information: ME and SP acknowledge the support by the Ministry of Education, Science and Technological Development of Serbia through project "Physics and Chemistry with Ion Beams", No. III45006. ME, SP and MK acknowledge that this work is part of the NTUA//VINS Collaboration Agreement. MK and SP acknowledge partial support by the Horizon 2020 project AIDA-2020, GA No. 654168. SF acknowledges the support of the Croatian Science Foundation under the project MIOBICC (No. 8127).
Uncontrolled Keywords: RBSc ; carbon ions ; diamond
Subjects: NATURAL SCIENCES > Physics
NATURAL SCIENCES > Physics > Nuclear Physics
Divisions: Division of Experimental Physics
Project titleProject leaderProject codeProject type
Promjene u kristaliničnim materijalima izazvane ionskim snopovima MeV-skih energija-MIOBICCStjepko FazinićIP-2013-11-8127HRZZ
Advanced European Infrastructures for Detectors at Accelerators-AIDA-2020UNSPECIFIED654168EK
Depositing User: Stjepko Fazinić
Date Deposited: 14 Apr 2020 12:48
DOI: 10.1016/j.nimb.2017.12.001

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