Refractive index profiling of CeO2 thin films using reverse engineering methods

Janicki, Vesna; Zorc, Hrvoje (2002) Refractive index profiling of CeO2 thin films using reverse engineering methods. Thin Solid Films, 413 (1-2). pp. 198-202. ISSN 0040-6090

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Abstract

In some recent papers it was shown that ZrO2 single films can be modeled using inhomogeneous models. A similar modeling approach to analyze CeO2 layers has been used. Films have been produced using a standard reactive evaporation technique. Following the measurement results, obtained by normal incidence transmission and variable angle spectroscopic ellipsometry, reverse engineering of the monolayer with its sub-layers has been performed. Novel in this method is that no assumption of refractive index profile is needed. A very good fit of the experimental data with the reverse engineered multi-layers has been obtained, showing that it is possible to find a fine substructure of analyzed films.

Item Type:	Article
Uncontrolled Keywords:	thin films, optical properties, refractive index, reverse engineering
Subjects:	NATURAL SCIENCES > Physics
Divisions:	Division of Laser and Atomic Research and Development
Depositing User:	Vesna Janicki
Date Deposited:	11 Nov 2014 12:52
URI:	http://fulir.irb.hr/id/eprint/1593
DOI:	10.1016/S0040-6090(02)00336-X

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