Efficient Fabrication of High‐Density Ensembles of Color Centers via Ion Implantation on a Hot Diamond Substrate

Nieto Hernández, E.; Andrini, G.; Crnjac, Andreo; Brajković, Marko; Picariello, F.; Corte, Emilio; Pugliese, V.; Matijević, Matija; Aprà, P.; Varzi, V.; Forneris, Jacopo; Genovese, Marco; Siketić, Zdravko; Jakšić, Milko; Ditalia Tchernij, Sviatoslav (2024) Efficient Fabrication of High‐Density Ensembles of Color Centers via Ion Implantation on a Hot Diamond Substrate. Advanced Physics Research, 3 (12). ISSN 2751-1200

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Abstract

Nitrogen-vacancy (NV) centers in diamonds are one of the most promisingsystems for quantum technologies, including quantum metrology andsensing. A promising strategy for the achievement of high sensitivity toexternal fields relies on the exploitation of large ensembles of NV centers,whose fabrication by ion implantation is upper limited by the amount ofradiation damage introduced in the diamond lattice. In this work an approachis demonstrated to increase the density of NV centers upon the high-fluenceimplantation of MeV N2+ions on a hot target substrate (>550 °C). The resultsshow that with respect to room-temperature implantation, thehigh-temperature process increases the vacancy density threshold requiredfor the irreversible conversion of diamond to a graphitic phase, thus enablingto achieve higher density ensembles. Furthermore, the formation efficiency ofcolor centers is investigated on diamond substrates implanted at varyingtemperatures with MeV N2+and Mg+ions revealing that the formationefficiency of both NV centers and magnesium-vacancy (MgV) centersincreases with the implantation temperature.

Item Type:	Article
Uncontrolled Keywords:	Nitrogen-vacancy centers; diamond; ion implantation; high-temperature implantation; NV center density; radiation damage; MeV ions; N2+ ions; Mg+ ions; color center formation; magnesium-vacancy centers; quantum sensing; quantum metrology; defect engineering
Subjects:	NATURAL SCIENCES NATURAL SCIENCES > Physics NATURAL SCIENCES > Physics > Condensed Matter Physics
Divisions:	Division of Experimental Physics
Depositing User:	Kristina Ciglar
Date Deposited:	06 May 2025 08:05
URI:	http://fulir.irb.hr/id/eprint/9811
DOI:	10.1002/apxr.202400067

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