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Sensing Properties of Oxidized Nanostructured Silicon Surface on Vaporized Molecules

Baran, Nikola; Gebavi, Hrvoje; Mikac, Lara; Ristić, Davor; Gotić, Marijan; Syed, Kamran Ali; Ivanda, Mile (2019) Sensing Properties of Oxidized Nanostructured Silicon Surface on Vaporized Molecules. Sensors, 19 (1). ISSN 1424-8220

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Porous silicon has been intensely studied for the past several decades and its applications were found in photovoltaics, biomedicine, and sensors. An important aspect for sensing devices is their long–term stability. One of the more prominent changes that occur with porous silicon as it is exposed to atmosphere is oxidation. In this work we study the influence of oxidation on the sensing properties of porous silicon. Porous silicon layers were prepared by electrochemical etching and oxidized in a tube furnace. We observed that electrical resistance of oxidized samples rises in response to the increasing ambient concentration of organic vapours and ammonia gas. Furthermore, we note the sensitivity is dependent on the oxygen treatment of the porous layer. This indicates that porous silicon has a potential use in sensing of organic vapours and ammonia gas when covered with an oxide layer.

Item Type: Article
Uncontrolled Keywords: porous ; silicon ; sensors ; gas ; ammonia ; solvents ; organic ; oxidized
Subjects: NATURAL SCIENCES > Physics
Divisions: Division of Materials Physics
Project titleProject leaderProject codeProject type
Hibriridne silicijske nanstrukture za senzorik-NANOSENSMile IvandaIP-2014-09-7046HRZZ
Depositing User: Mile Ivanda
Date Deposited: 11 Jun 2019 11:00
DOI: 10.3390/s19010119

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