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Development of nano-roughness calibration standards

Baršić, Gorana; Mahović, Sanjin; Zorc, Hrvoje (2012) Development of nano-roughness calibration standards. Measurement Science and Technology, 23 (3). 035009-1-035009-9. ISSN 0957-0233

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At the Laboratory for Precise Measurements of Length, currently the Croatian National Laboratory for Length, unique nano-roughness calibration standards were developed, which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Rudee Boskovic Institute. In this paper, a new design for a calibration standard with two measuring surfaces is presented. One of the surfaces is for the reproduction of roughness parameters, while the other is for the traceability of length units below 50 nm. The nominal values of the groove depths on these measuring surfaces are the same. Thus, a link between the measuring surfaces has been ensured, which makes these standards unique. Furthermore, the calibration standards available on the market are generally designed specifically for individual groups of measuring instrumentation, such as interferometric microscopes, stylus instruments, scanning electron microscopes (SEM) or scanning probe microscopes. In this paper, a new design for nano-roughness standards has been proposed for use in the calibration of optical instruments, as well as for stylus instruments, SEM, atomic force microscopes and scanning tunneling microscopes. Therefore, the development of these new nano-roughness calibration standards greatly contributes to the reproducibility of the results of groove depth measurement as well as the 2D and 3D roughness parameters obtained by various measuring methods.

Item Type: Article
Uncontrolled Keywords: nanometrology; roughness standards; reproducibility
Subjects: TECHNICAL SCIENCES > Mechanical Engineering
TECHNICAL SCIENCES > Interdisciplinary Technical Sciences > Micro and Nano Technologies
Divisions: Division of Laser and Atomic Research and Development
Project titleProject leaderProject codeProject type
Nacionalni laboratorij za duljinu[32641] Vedran Mudronja120-1201785-1784MZOS
Optička svojstva nanostrukturnih slojeva[119546] Hrvoje Zorc098-0000000-3191MZOS
Depositing User: Hrvoje Zorc
Date Deposited: 07 May 2015 08:37
DOI: 10.1088/0957-0233/23/3/035009

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