Optical characterization and reverse engineering based on multiangle spectroscopy

Tikhonravov, Alexander; Amotchkina, Tatiana; Trubetskov, Michael; Francis, Robert; Janicki, Vesna; Sancho-Parramon, Jordi; Zorc, Hrvoje; Pervak, Vladimir (2012) Optical characterization and reverse engineering based on multiangle spectroscopy. Applied Optics, 51 (2). pp. 245-254. ISSN 0003-6935

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Abstract

We perform characterization of thin films and reverse engineering of multilayer coatings on the basis of multiangle spectral photometric data provided by a new advanced spectrophotometer accessory. Experimental samples of single thin films and multilayer coatings are produced by magnetron sputtering and e-beam evaporation. Reflectance and transmittance data at two polarization states are measured at the incidence angles from 7 to 40 degrees. We demonstrate that multiangle reflectance and transmittance data provide reliable characterization and reverse engineering results.

Item Type:

Article

Additional Information:

This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-51-2-245. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Uncontrolled Keywords:

multiangle spectroscopy; optical characterization

Subjects:

NATURAL SCIENCES > Physics

Divisions:

Division of Laser and Atomic Research and Development

Projects: