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Andrini, G.; Nieto Hernández, E.; Provatas, Georgios; Brajković, Marko; Crnjac, Andreo; Tchernij, S. Ditalia; Forneris, J.; Rigato, V.; Campostrini, M.; Siketić, Zdravko; Jakšić, Milko; Vittone, E. (2022) An ion beam spot size monitor based on a nano-machined Si photodiode probed by means of the ion beam induced charge technique. Vacuum, 205 . ISSN 0042-207X