Items where Author is "Batenburg, Kevin M."

Article

Vu, Thi Thanh Huong; Batenburg, Kevin M.; Aarnink, Antonius A.I.; Knežević, Tihomir; Liu, Xingyu; Nanver, Lis K. (2023) Batch furnace CVD of pure boron layers on Si and GaN substrates for low-leakage-current diode fabrication. JST - Engineering and Technology For Sustainable Development, 33 (2). pp. 29-35. ISSN 3093-3242