Surface analysis and depth profiling using time-of-flight elastic recoil detection analysis with argon sputtering

Siketić, Zdravko; Bogdanović Radović, Ivančica; Sudić, Ivan; Jakšić, Milko (2018) Surface analysis and depth profiling using time-of-flight elastic recoil detection analysis with argon sputtering. Scientific Reports, 8 . ISSN 2045-2322

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Abstract

The recent development of new advanced materials demands extensive effort in developing new analytical techniques that can provide insight into material composition at the nanoscale, particularly at surfaces and interfaces, which is important for both fabrication and material performance. Here, we present a proof of principle for a new setup used for thin-film characterisation and depth profiling based on a combination of time-of-flight elastic recoil detection analysis (TOF-ERDA) and Ar sputtering. A quantitative depth profiling with a best achievable surface depth resolution of ~2 nm can be realised for the entire layer, which is important for the precise determination of thickness and composition of samples that are several tenths of a nanometre thick. The performance of TOF-ERDA with Ar sputtering was demonstrated using 15 nm Cu evaporated onto a Si substrate. The advantages and limits of the method are discussed in detail.

Item Type:	Article
Uncontrolled Keywords:	TOF-ERDA ; Depth profiling ; Ar sputtering
Subjects:	NATURAL SCIENCES > Physics
Divisions:	Division of Experimental Physics
Projects:	Project title Project leader Project code Project type “Center of Excellence for Advanced Materials and Sensing Devices” UNSPECIFIED KK.01.1.1.01.0001 UNSPECIFIED
Depositing User:	Ivančica Bogdanović Radović
Date Deposited:	13 Jul 2018 10:23
URI:	http://fulir.irb.hr/id/eprint/4092
DOI:	10.1038/s41598-018-28726-x

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