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Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region

Barac, Marko; Brajković, Marko; Siketić, Zdravko; Ekar, Jernej; Bogdanović Radović, Ivančica; Šrut Rakić, Iva; Kovač, Janez (2022) Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region. Scientific Reports, 12 (1). ISSN 2045-2322

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This work explores the possibility of depth profiling of inorganic materials with Megaelectron Volt Secondary Ion Mass Spectrometry using low energy primary ions (LE MeV SIMS), specifically 555 keV Cu ²⁺ , while etching the surface with 1 keV Ar ⁺ ions. This is demonstrated on a dual-layer sample consisting of 50 nm Cr layer deposited on 150 nm In2O5Sn (ITO) glass. These materials proved to have sufficient secondary ion yield in previous studies using copper ions with energies of several hundred keV. LE MeV SIMS and keV SIMS depth profiles of Cr-ITO dual-layer are compared and corroborated by atomic force microscopy (AFM) and time-of-flight elastic recoil detection analysis (TOF-ERDA). The results show the potential of LE MeV SIMS depth profiling of inorganic multilayer systems in accelerator facilities equipped with MeV SIMS setup and a fairly simple sputtering source.

Item Type: Article
Uncontrolled Keywords: low-energy MeV SIMS ; ion sputtering ; depth profiling ; inorganic materials
Subjects: NATURAL SCIENCES > Physics > Nuclear Physics
TECHNICAL SCIENCES > Interdisciplinary Technical Sciences > Micro and Nano Technologies
Divisions: Division of Experimental Physics
Center of Excellence for Advanced Materials and Sensing Devices
Project titleProject leaderProject codeProject type
Istraživanje i razvoj s ionskim zrakama – unaprjeđenje tehnologije u Europi-RADIATEIvančica Bogdanović Radović824096EK
Znanstveni centar izvrsnosti za napredne materijale i senzore-CEMSMarko Kralj; Milko Jakšić; Mario Stipčević; Mile IvandaN/AEK
Depositing User: Marko Barac
Date Deposited: 02 Sep 2022 13:58
DOI: 10.1038/s41598-022-16042-4

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