Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region

Barac, Marko; Brajković, Marko; Siketić, Zdravko; Ekar, Jernej; Bogdanović Radović, Ivančica; Šrut Rakić, Iva; Kovač, Janez (2022) Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region. Scientific Reports, 12 (1). ISSN 2045-2322

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Abstract

This work explores the possibility of depth profiling of inorganic materials with Megaelectron Volt Secondary Ion Mass Spectrometry using low energy primary ions (LE MeV SIMS), specifically 555 keV Cu ²⁺ , while etching the surface with 1 keV Ar ⁺ ions. This is demonstrated on a dual-layer sample consisting of 50 nm Cr layer deposited on 150 nm In2O5Sn (ITO) glass. These materials proved to have sufficient secondary ion yield in previous studies using copper ions with energies of several hundred keV. LE MeV SIMS and keV SIMS depth profiles of Cr-ITO dual-layer are compared and corroborated by atomic force microscopy (AFM) and time-of-flight elastic recoil detection analysis (TOF-ERDA). The results show the potential of LE MeV SIMS depth profiling of inorganic multilayer systems in accelerator facilities equipped with MeV SIMS setup and a fairly simple sputtering source.

Item Type:	Article
Uncontrolled Keywords:	low-energy MeV SIMS ; ion sputtering ; depth profiling ; inorganic materials
Subjects:	NATURAL SCIENCES > Physics > Nuclear Physics TECHNICAL SCIENCES > Interdisciplinary Technical Sciences > Micro and Nano Technologies
Divisions:	Division of Experimental Physics Center of Excellence for Advanced Materials and Sensing Devices
Projects:	Project title Project leader Project code Project type Istraživanje i razvoj s ionskim zrakama – unaprjeđenje tehnologije u Europi-RADIATE Ivančica Bogdanović Radović 824096 EK Znanstveni centar izvrsnosti za napredne materijale i senzore-CEMS Marko Kralj; Milko Jakšić; Mario Stipčević; Mile Ivanda N/A EK
Depositing User:	Marko Barac
Date Deposited:	02 Sep 2022 13:58
URI:	http://fulir.irb.hr/id/eprint/7542
DOI:	10.1038/s41598-022-16042-4

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