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Nano Si Superlattices for the Next Generation Solar Cells

Pivac, Branko; Dubček, Pavo; Capan, Ivana; Zulim, Ivan; Betti, Tihomir; Zorc, Hrvoje; Bernstorff, Sigrid (2009) Nano Si Superlattices for the Next Generation Solar Cells. Journal of Nanoscience and Nanotechnology, 9 (6). pp. 3853-3857. ISSN 1533-4880

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We present a study on amorphous SiO/SiO2 superlattice formation on Si substrate held at room temperature and annealed in the temperature range 600– 1100 °C. Grazing-incidence small-angle X-ray scattering (GISAXS) and X-ray reflectivity were used to study such samples. Amorphous SiO/SiO2 superlattices were prepared by high vacuum physical vapor deposition of 4 nm thin films of SiO and SiO2 (10 layers each) from corresponding targets on silicon substrate. Rotation of the Si substrate during evaporation ensured homogeneity of the films over the whole substrate. We observed that the inhomogeneities introduced into the SiO and SiO2 layers during the deposition(evaporation) give rise to small angle scattering at lower annealing temperatures. After an initial SiO layer thickness reduction for 600 °C annealing, these thicknesses remain virtually unchanged up to 1000 °C, where they start to decrease again which leads to particle formation. Nevertheless, this compacting at low temperatures may lead to the seed formation in SiO layers that will facilitate later Si nanoparticles growth.

Item Type: Article
Uncontrolled Keywords: Si nanostructures; SiO/SiO2 amorfhous superlattice; small angle X-ray scattering; synchrotron radiation; solar cells
Subjects: NATURAL SCIENCES > Physics
NATURAL SCIENCES > Physics > Condensed Matter Physics
Divisions: Division of Laser and Atomic Research and Development
Division of Materials Physics
Project titleProject leaderProject codeProject type
Optička svojstva nanostrukturnih slojeva[119546] Hrvoje Zorc098-0000000-3191MZOS
Novel Solar Radiation Models with Application in PV Generation of ElectricityIvan Zulim023-0982886-1612MZOS
Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima[67912] Branko Pivac098-0982886-2866MZOS
Depositing User: Hrvoje Zorc
Date Deposited: 06 Nov 2015 15:45
DOI: 10.1166/jnn.2009.NS79

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