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Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating

Janicki, Vesna; Gäbler, Dieter; Wilbrandt, Steffen; Leitel, Robert; Stenzel, Olaf; Lappschies, Marc; Görtz, Björn; Ristau, Dieter; Rickers, Christoph; Vergöhl, M. (2006) Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating. Applied Optics, 45 (30). pp. 7851-7857. ISSN 0003-6935

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The gradient index coatings and optical filters based on them are a challenge for fabrication. In a round-robin experiment basically the same hybrid antireflection coating for the visible spectral region has been deposited with three different techniques: electron beam evaporation, ion beam sputtering and radio frequency magnetron-sputtering. Spectral performances of such one-side and both-side coated samples have been compared with corresponding theoretical spectra of the designed profile. Also, reproducibility of each process is checked.

Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Uncontrolled Keywords: antireflection; coatings; deposition and fabrication; gradient index; hybrid coating; mixture layers; co-deposition; co-sputtering
Subjects: NATURAL SCIENCES > Physics
Divisions: Division of Laser and Atomic Research and Development
Depositing User: Vesna Janicki
Date Deposited: 28 Oct 2014 15:39
DOI: 10.1364/AO.45.007851

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