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Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements

Janicki, Vesna; Sancho-Parramon, Jordi; Stenzel, Olaf; Lappschies, Marc; Görtz, Björn; Rickers, Christoph; Polenzky, Christina; Richter, Uwe (2007) Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements. Applied Optics, 46 (24). pp. 6084-6091. ISSN 0003-6935

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Abstract

A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analysed by optical characterisation based on spectrophotometric and spectroscopic ellipsometric measurements under different angles of incidence in order to precisely characterise the coatings. The Lorentz-Lorenz model has been used for calculation of refractive index of material mixtures in gradient index layers as well as some homogenous parts of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.

Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-46-24-6084. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Uncontrolled Keywords: antireflective coating; optical characterisation; hybrid coating; reverse engineering; variable angle spectroscopic ellipsometry
Subjects: NATURAL SCIENCES > Physics
Divisions: Division of Laser and Atomic Research and Development
Depositing User: Vesna Janicki
Date Deposited: 28 Oct 2014 13:04
Last Modified: 28 Oct 2014 13:04
URI: http://fulir.irb.hr/id/eprint/1557
DOI: 10.1364/AO.46.006084

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